| 摘要 |
PROBLEM TO BE SOLVED: To provide an interference measuring method and an interferometer capable of modulating the phases of interference fringes with high precision. SOLUTION: In this interference measuring method, angles of projection of luminous fluxes to be projected to an object to be inspected (1) and a reference object (2) are changed keeping the relative positional relation between the object (1) and the reference object (2), and changes in luminance generated in interference fringes caused by changes in the angles of projection are detected. Though the phases of the interference fringes are modulated, when the angles of projection are changed in this way, these are not accompanied with any changes in wavelength of a light source and changes in the relative positional relation between the object to be inspected and the reference object. In addition, motion for modulating the phases is not transfer but rotation, so precision of phase modulation is high. COPYRIGHT: (C)2006,JPO&NCIPI
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