DIAGNOSTIC SYSTEM FOR PROFILING MICRO-BEAMS

摘要

An apparatus for characterization of a micro beam comprising a micro modified Faraday cup assembly (102) including a first layer (201) of material, a second layer (202) of material operatively connected to the first layer of material, a third layer (203) of material operatively connected to the second layer (202) of material, and a fourth layer (204) of material operatively connected to the third layer (203) of material. The first layer (201) of material comprises an electrical conducting material and has at least one first layer radial slit extending through the first layer. An electrical ground is connected to the first layer. The second layer (202) of material comprises an insulating material and has at least one second layer radial slit corresponding to the first layer radial slit in the first layer of material. The second layer radial slit extends through the second layer. The third layer of material comprises a conducting mAn apparatus for characterization of a micro beam comprising a micro modified Faraday cup assembly including a first layer of material, a second layer of material operatively connected to the first layer layer of material, a third layer of material operatively connected to the second layer of material, and a fourth layer of material operatively connected to the third layer of material. The first layer of material comprises an electrical conducting material and has at least one first layer radial slit extending through the first layer. An electrical ground is connected to the first layer. The second layer of material comprises an insulating material and has at least one second layer radial slit corresponding to the first layer radial slit in the first layer of material. The second layer radial slit extends through the second layer. The third layer of material comprises a conducting material and has at least one third layer radial slit corresponding to the second layer radial slit in the second layer of material. The third layer radial slit extends through the third layer. The fourth layer of material comprises an electrical conducting material but does not have slits. An electrically measuring device is connected to the fourth layer. The micro modified Faraday cup assembly is positioned to be swept by the micro beam.