| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an XY stage system which can be easily transported by land at low transportation cost, by having a surface plate which has a size responsive to a large-area substrate and can be divided into surface plate pieces so as to be compatible with transportation by land. <P>SOLUTION: The XY stage system comprises the surface plate 100 having a prescribed length, width, and thickness, and a flat top surface; and a movable stage 20 so structured as to be movable by actuators 200 on the top surface of the surface plate 100. The surface plate 100 is a jointed assembly of the surface plate pieces 101a which have been divided in the width direction, and the actuators 200 are each arranged so as not to stride straddle the joint between the surface plate pieces 101a at the moving of the movable stage 20. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
