发明名称 MEASURING METHOD OF DECLINATION ANGLE
摘要 <P>PROBLEM TO BE SOLVED: To provide a measuring method of declination angle capable of easily and effectively measuring the declination angle. <P>SOLUTION: The method comprises a measuring process for photographing a sample point 53 by using a camera 31 of which the optical axis faces the direction of normal to a reference plane, and measuring the relation of a distance D from the cross point 61 of a marked line corresponding to the optical axis 50 of a sample point 63 in the image photographed with the camera 31 and an angle &theta; of the light emitted from the sample point 53 to the optical axis 50, a photographing process putting the camera 31 in a state its reference plane touches the irradiation surface on the irradiation surface and photographing the lens, and an arithmetic process for calculating the declination angle of the light irradiating the irradiation surface to the irradiation surface from the distance between the center of the lens photographed with the camera 31 and the cross point 61 of the marked line. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006010510(A) 申请公布日期 2006.01.12
申请号 JP20040188238 申请日期 2004.06.25
申请人 DAINIPPON KAKEN:KK 发明人 MORI YASUO;OISHI SUSUMU;KONO TAKESHI;YONETANI MASAHIRO;KOIDE TAIICHIRO
分类号 G01B11/26;G03F7/20;H01L21/027 主分类号 G01B11/26
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