| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric vibration device for adopting second sealing under a vacuum atmosphere whereby no molten gas of a sealing member is resident in a package and no dispersion takes place in product characteristics. <P>SOLUTION: In the manufacturing method of the piezoelectric vibration device wherein a circumferential part of an opening of a package 1 and a lid 2 for covering the opening are welded via a sealing member 2b under a vacuum atmosphere in a welding step, which comprises: a primary sealing step of welding the lid 2 to the circumferential part while leaving a residual opening at part of the circumferential part of the opening; an exhaust step by vacuuming; and thereafter a secondary sealing step of welding the lid to the opening residual part having not been welded, the primary sealing being carried out under a sealing condition defined by formula of 7.33≤a/b≤10.4, wherein a is an area of the opening and b is a size of the opening residual part. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
