摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide the manufacturing method of a piezo-electric element which can carry out polarization treatment in a thickness direction to have a desired orientation degree at a lower polarization voltage and therefore hardly generates cracks in polarization. <P>SOLUTION: The manufacturing method of the piezo-electric element has a process for closely sticking a metallic material to the upper surface and the lower surface of a ceramic green sheet 1, a baking process for baking the ceramic green sheet 1 with the metallic materials 2, 3 closely stuck to the upper surface and the lower surface and obtaining a ceramic sintered body 1A, a removal process for removing the metallic materials 2, 3 from the ceramic sintered body 1A, and a polarization process which is carried out after the baking process and carries out polarization by applying a voltage between the upper surface and the lower surface of the ceramic sintered body 1A. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |