| 摘要 |
PROBLEM TO BE SOLVED: To provide a drying method of coated film and a drying apparatus of coated film which permits miniaturization of the apparatus for drying a coated film coated on a substrate and the reduction of apparatus cost and, at the same time, is capable of suppressing the deterioration of flatness and the fluctuation of flatness as to the dried coated film. SOLUTION: The substrate 2 is held by a stage 8, an ink film 3 applied on the substrate 2 is heated from the above side by means of a plate-like heater 9 and, thereby, is dried. Moreover, a region 26 to be heated of the ink film 3 which should be heated for drying is smaller than the coated region 22 of the ink film 3. That is, a plate-like heater 9 for heating the ink film 3 heats a part of the ink film 3. COPYRIGHT: (C)2006,JPO&NCIPI |
