| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp composed by preventing undesired creeping discharge between an internal electrode exposed from an open part at least at one end of an inner tube formed so as to cover the internal electrode in a discharge vessel and an external electrode, in an excimer lamp with the internal electrode formed in the discharge vessel provided with the external electrode on the outside surface. SOLUTION: This excimer lamp is characterized by forming, at an end of the inner tube formed so as to cover the internal electrode in the discharge vessel, a creeping discharge prevention means for preventing creeping discharge between the internal electrode projecting from the inner tube and the external electrode. COPYRIGHT: (C)2006,JPO&NCIPI
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