| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of precisely measuring a pressure, and to provide a method for manufacturing the pressure sensor. SOLUTION: A capacitive pressure sensor is provided, which has a spacer 11 being made of a single crystal body of aluminum oxide and composed of a plate body 10 with a through hole; a sensor diaphragm 20 being made of a single crystal body of aluminum oxide, having a movable electrode formed at its prescribed position, being directly bonded to one surface side of the spacer, and having a distortion region whose outer diameter is almost equal to the through hole; and a sensor seat 30 being made of a single crystal body of aluminum oxide, having a fixed electrode formed at its portion, being directly bonded to the sensor diaphragm, and making up a capacitive chamber for measuring the pressures along with the sensor diaphragm. A recess which makes up an aperture including regions wherein burrs and debris are formed when the through hole is produced, is formed over the whole edge circumference of the through hole aperture of the spacer on the diaphragm bonding side. COPYRIGHT: (C)2006,JPO&NCIPI
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