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发明名称
APPARATUS FOR TREATING SUBSTRATE BY PLASMA AND METHOD THEREOF
摘要
申请公布号
KR100542459(B1)
申请公布日期
2006.01.12
申请号
KR20000011432
申请日期
2000.03.08
申请人
发明人
分类号
H05H1/30
主分类号
H05H1/30
代理机构
代理人
主权项
地址
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