CHARGED PARTICLE BEAM EXPOSURE DEVICE AND ADJUSTING METHOD OF CHARGED PARTICLE BEAM EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To accurately measure charged particle optical relative positions of two throttle sheets or more and calibrate them.

SOLUTION: A measuring means is provided with aperture arrays 3 and lens arrays 4 as a plurality of sheets for measuring the charged particle optical relative positions of the aperture arrays 3 and the lens arrays 4 out of a plurality of the throttle sheets using measurement openings as targets other than a group of openings 19, 21 used for exposure. The targets are the measurement openings 20, 22 and a Faraday cup 17 disposed inside the throttles.

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