| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent adhesion of an electric insulating member to a sensing part, and to suppress deterioration of detection sensitivity, in a sensor device wherein an electric connection part of a sensor element is covered and protected by the electric insulating member in the state where the sensing part of the sensor element is exposed. <P>SOLUTION: In this sensor device 100 equipped with the sensor element 20 having the sensing part 21 for detection, wherein the electric connection part 30 which is a part for connecting electrically the sensor element 20 to the outside is covered and protected by the electric insulating member in the state where the sensing part 21 is exposed, the electric insulating member is a deposited film comprising Parylene or the like formed by a deposition method to the electric connection part 30. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
