| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning transmission electron microscope capable of independently setting capturing angle ranges of a scattered electron beam detector and an energy spectrometer, and not requiring to change a condition of the energy spectrometer for the change of the capturing angle range of the scattered electron beam detector. SOLUTION: In the scanning transmission electron microscope provided with the energy spectrometer 18, a first rotational-symmetry lens 6 setting a scattered electron beam capturing angle is disposed in an upper part of the scattered electron beam detector detecting an electron beam scattered by a sample 32, a second rotational symmetry lens 13 is disposed between the scattered electron beam detector and the energy spectrometer 18, the scattered electron beam capturing angle is set with the first rotational symmetry lens 6, and an object point of the energy spectrometer 18 is set with the second rotational symmetry lens 13. COPYRIGHT: (C)2006,JPO&NCIPI
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