| 摘要 |
PROBLEM TO BE SOLVED: To ensure the high inspection accuracy, while easily coping with various sizes of the diameters of cylinder elements 90 (90'). SOLUTION: A pair of reference sections 20, 20 contact an inner circumference 92 on both the side ends of the cylinder elements 90 (90'). The cylinder elements 90 (90') are rotated so as to displace a contact section between the cylinder elements 90 (90') and a pair of the reference sections 20, 20 in the circumferential direction, on the inner circumference 92 of the cylinder elements 90 (90'). The surface state is detected on a reference line, with respect to a virtual line passing through two contact sections between the inner circumferential surface 92 of the cylinder elements 90 (90') and a pair of the reference sections 20, 20 from the outside of the cylinder elements 90 (90') or in the vicinity of the reference line. COPYRIGHT: (C)2006,JPO&NCIPI
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