VACUUM SEALED INERTIA FORCE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an inertia force sensor of high productivity and high sensitivity whose vacuum lock is carried out. SOLUTION: A gettering agent can be arranged simply and surely and manufacture with high productivity is realized, by carrying out tapering processing of a gettering-agent to the inserting part of a semiconductor. COPYRIGHT: (C)2006,JPO&NCIPI