| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively provide highly reliable equipment in which magnification of a fault especially due to plugging of piping etc. can be prevented, and which can stably be used for long time in laser oscillation equipment using a blower and in a laser beam machine. SOLUTION: Equipment is provided with a main exhaust mechanism 25 having at least one or more valves exhausting laser gas from a laser gas passageway 10, an auxiliary exhaust mechanism 26 exhausting laser gas from the driving part 22 of a blast means, and a controller 30 detecting the opening/closing period of a supply valve 31 of laser gas. A means is installed for detecting an opening/closing period of the supply valve 31 when the valve of the main exhaust mechanism 25 is opened and closed and comparing a value when the valve is opened and a value when the valve is closed so as to generate an alarm. COPYRIGHT: (C)2006,JPO&NCIPI |
