发明名称 |
LID FOR WAFER-SCALE PACKAGE AND ITS FORMING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for improving the packaging of an optoelectronic device. SOLUTION: A method for forming a lid for a wafer-scale package has: a step of forming a cavity in a substrate; a step of forming an oxide layer on the cavity on the wafer and a bonding region in the circumference of the cavity; a step of forming a reflection layer on the oxide layer; a step of forming a barrier layer on the reflection layer; a step of exposing a part of the reflection layer by etching a part of the barrier layer located on the bonding region; and a step of forming a solder layer on a part of the reflection layer. COPYRIGHT: (C)2006,JPO&NCIPI |
申请公布号 |
JP2006013484(A) |
申请公布日期 |
2006.01.12 |
申请号 |
JP20050163977 |
申请日期 |
2005.06.03 |
申请人 |
AGILENT TECHNOL INC |
发明人 |
GALLUP KENDRA J;MATTHEWS JAMES A;JOHNSON MARTHA |
分类号 |
H01S5/022;G02B6/42;H01L21/00;H01L23/02;H01L33/48;H01S5/026 |
主分类号 |
H01S5/022 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|