| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor for chemical liquid having a good property and high reliability, which prevents a heat welded section from damaging while keeping airtightness of a pressure receiving space, reduces the amount of gas passing through a pressure receiving diaphragm, prolongs the lifetime of the pressure sensor, and eliminates a structural deformation and a residual stress of the pressure receiving diaphragm. SOLUTION: The pressure sensor for chemical liquid is equipped with a pressure element; a case which supports the pressure element at its inside; a main section which has the pressure receiving diaphragm being formed on the upper surface opposite to the pressure element and transmitting pressures to the pressure element, and has the pressure receiving space acting on the pressure receiving diaphragm such that the pressure receiving space opens to the lower surface opposite to the above upper surface; and a pressure introducing tube which has a flange section engaging with the above opening section and introduces chemical liquid into the pressure receiving space. The main section and the flange section of the pressure introducing tube are welded airtightly, and the case and the main section are connected and fixed such that the pressure element is attached firmly to the pressure receiving diaphragm. COPYRIGHT: (C)2006,JPO&NCIPI
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