| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion balance sensor having a good S/N ratio and a static eliminator equipped with it. SOLUTION: The ion balance sensor is composed of one conductor having an insulating coating layer and the other one conductor having no insulating coating layer and these two conductors are twisted. The static eliminator equipped with the ion balance sensor is composed of an ion emission electrode and the ion balance sensor arranged in the region of the ions emitted from the ion emission electrode. The ion balance sensor is composed of one conductor having the insulating coating layer and the other one conductor having no insulating coating layer and these two conductors are twisted. COPYRIGHT: (C)2006,JPO&NCIPI
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