| 摘要 |
PROBLEM TO BE SOLVED: To form a coat with a uniform thickness on the surface of a work such as a substrate. SOLUTION: A spray coating apparatus has a work supporting table 3 in a coating chamber 1 and sprays a coating liquid on a work 2 loaded on the work supporting table 3 to make the coat on the surface of the work 2. And this apparatus is equipped with a coating nozzle 5 spraying the coating liquid on the work 2, a solvent supplying nozzle 8, 8 spraying a solvent contained in the coating liquid outside 7 spraying area of the coating liquid, in the coating chamber 1, and further equipped with a means 11 discharging a misty sprayed solvent 9a outside the chamber and a means 14 controlling a concentration of the solvent outside 7 spraying area in the chamber 1. A spray coating method has a step spraying of the coating liquid from the coating nozzle 5 to form the coat on the surface of the work 2 loaded on the work supporting table 3 while controlling the concentration, outside 7 spraying area, of the solvent sprayed from the solvent supplying nozzle 8, 8. COPYRIGHT: (C)2006,JPO&NCIPI
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