| 摘要 |
PROBLEM TO BE SOLVED: To realize a fine particle measuring instrument, which can rapidly measure fine particles in a region to be measured with high precision, at a low cost. SOLUTION: A plurality of semiconductor lasers 11 and 21 for emitting beams mutually different in wavelength and a photodetector for detecting the scattered beams, which are reflected from the fine particles in gas irradiated with the emitted beams from the semiconductor lasers 11 and 21, are arranged in a cylindrical member to detect the beams at every wavelength by the photodetector. Then, the number and size of the fine particles are operated and calculated from the electric signal outputted from the photodetector corresponding to the detection of beams by the photodetector. COPYRIGHT: (C)2006,JPO&NCIPI
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