Method of producing a titanium-suboxide-based coating material, correspondingly produced coating material and sputter target provided there-with

摘要

A method of producing a titanium-suboxide-based coating material comprises the following steps: providing a titanium-suboxide base material; and treating the titanium-suboxide base material under oxidizing conditions for in-situ development of a finely dispersed titanium-dioxide component in the ceramic titanium-suboxide base material.