摘要 |
<P>PROBLEM TO BE SOLVED: To provide an energy-line sensitive acid generator having high sensitivity to an energy line, particularly light in a wavelength band of 300-450 nm, even if it is not used both as a sensitizer, and being usable effectively for various purposes that use acid-catalyzed polymerization reaction, crosslinking reaction, decomposition reaction, etc. <P>SOLUTION: The energy-line sensitive acid forming agent is represented by formula (1), wherein R<SB>01</SB>-R<SB>05</SB>, R<SB>11</SB>and R<SB>12</SB>each independently represents H or the like; R<SB>21</SB>and R<SB>22</SB>each independently represents alkyl or the like; and X<SP>-</SP>represents an arbitrary anion. <P>COPYRIGHT: (C)2006,JPO&NCIPI |