IMAGE DATA CORRECTION METHOD, LITHOGRAPHY SIMULATION METHOD, PROGRAM AND MASK

摘要

PROBLEM TO BE SOLVED: To provide an image data correction method, capable of correcting an image pattern using a small data amount at a high speed and with high accuracy.

SOLUTION: The method includes a process (S12) of preparing a correction data for correcting a distortion of the image obtained from an image acquisition section; a process (S22) of acquiring a contour data of a desired pattern obtained from the image acquisition section; and a process (S23) of correcting the contour data of the desired pattern by using the correction data.

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