POLARIZING ELEMENT, METHOD FOR MANUFACTURING POLARIZING ELEMENT, AND METHOD FOR EVALUATING EXPOSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a polarizing element with which sufficient performance can be obtained even in a deep UV region (≤200 nm) and a method for manufacturing the polarizing element.

SOLUTION: A carbon nanotube film 1 extending to a perpendicular direction is formed on a quartz glass substrate 2. A level difference is formed on the glass substrate 2 and the carbon-based substance is inclined in one direction by applying a mechanical stress to a position apart by a prescribed distance from the bottom end of the carbon nanotube by utilizing the level difference.

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