发明名称 CELL DRIVE TYPE PIEZOELECTRIC/ELECTROSTRICTIVE ACTUATOR AND MANUFACTURING METHOD THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostrictive actuator which is suitably used for an ink jet printer in which the elements led to generation of problems such as stray of ink, leak of ink, or short circuit of electrode and migration are thoroughly eliminated. <P>SOLUTION: The cell drive type piezoelectric/electrostrictive actuator is provided with one or a plurality of cells 3 formed of walls including two side walls 6 and a ceiling wall 7 connecting these two side walls 6 and a bottom wall 2. At least two side walls 6 are formed of a piezoelectric/electrostrictive operatig portion 4 and the volume of the cell 3 is varied with displacement of the piezoelectric/electrostrictive operating portion 4. The ceiling wall 7 is provided with two fine holes 8 and one or more layers of seamless thin film 17 is formed covering the entire part of the internal surface of the cell of the wall portion. This actuator is applied to an ink jet printer head to solve the problems. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006013411(A) 申请公布日期 2006.01.12
申请号 JP20040249798 申请日期 2004.08.30
申请人 NGK INSULATORS LTD 发明人 OMORI MAKOTO;KIMURA KOJI
分类号 H01L41/083;B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/145;B41J2/16;F04B17/00;F04B43/04;H01L41/04;H01L41/187;H01L41/22;H01L41/23;H02N2/00 主分类号 H01L41/083
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