| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gyrac accelerating electron type ECR ion source capable of producing a perfectly ionized ion, H-like and H3-like high-ions. <P>SOLUTION: The gyrac accelerating electron type ECR ion source comprises a plasma chamber 22 for housing plasma, a solenoid coil 24 for generating a mirror magnetic field to confine the plasma in the axial direction of the plasma chamber 22, a magnet 26 for generating a multipolar magnetic field to confine the plasma in the diameter direction thereof, a pulse coil 30 arranged on the outer of the plasma chamber 22, for producing a pulse magnetic field where temporarily attenuates the peak portion of the mirror magnetic field, to gyrac accelerate an electron, a higher high-frequency power supply 40 for supplying a higher high frequency to the plasma chamber 22, a higher high frequency waveguide 42, a lower high-frequency power supply 50 for supplying a lower high frequency to the plasma chamber, and a lower high frequency waveguide 52. Then, gyrac accelerating ion type ECR ion source is constructed so as to accelerate an electron by the principle of gyrac acceleration to produce a multivalent ion. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
