| 摘要 |
<P>PROBLEM TO BE SOLVED: To make uniform introduction of microwave into a processing chamber and reduction of microwave voltage standing wave ratio compatible with each other with a purpose of providing a device uniformly processing a substance to be processed without imposing overload on a microwave power source circuit. <P>SOLUTION: The microwave emitting device emits microwave from a plurality of slots arranged on an endless annular wave guide, and only the microwave emission rate at the slot nearest to the microwave introducing part of the endless annular wave guide is made smaller than that of the other slots. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
