发明名称 CATHODE STRUCTURE OF ELECTRON GUN, MANUFACTURING METHOD OF THE SAME, AND ELECTRON GUN
摘要 PROBLEM TO BE SOLVED: To provide a cathode structure of an electron gun, a manufacturing method of the same, and an electron gun of which, heat radiation to a shielding member side is unprecedentedly sharply reduced. SOLUTION: On the cathode structure of the electron gun formed by inserting the cathode member emitting electron from an electron emission face by the heating of a heating face into the shielding member shielding the electron emitted from the outer periphery of the cathode member, prescribed gaps are formed between a hole part of the shielding member and outer periphery of the cathode member, and a plurality of protrusions for fitting, holding the cathode member on the shielding member by fitting into either the outer periphery of the cathode member or the hole part of the shielding member, are formed at the hole part of the shielding member or at the outer periphery of the cathode part. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006012530(A) 申请公布日期 2006.01.12
申请号 JP20040186393 申请日期 2004.06.24
申请人 NIKON CORP 发明人 NAKAMURA JUNJI
分类号 H01J37/06 主分类号 H01J37/06
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