| 摘要 |
PROBLEM TO BE SOLVED: To more accurately control a region to be irradiated with radiations such as ultra-violet rays to be radiated during a spin coating. SOLUTION: The spin coater is provided with a spin cup 110, which has a lower cover 111 where a 1st opening 111a larger than a rotation diameter D0 of an optical recording medium is formed and an upper cover 112 where a 2nd opening 112a smaller than the rotation diameter D0 is formed, a driving section 120, which supplies the optical recording medium 10 from the 1st opening 111a into the spin cup 110 and further which rotates the optical recording medium 10 supplied into the spin cup 110, and an irradiation section 130, which irradiates application liquid applied onto a surface of the optical recording medium 10 with radiations via the second opening 112a. Since the upper cover 112 of the spin cup 110 can also serve as a mask for radiations such as ultra-violet light, thereby the irradiated region with radiations can be very accurately controlled. COPYRIGHT: (C)2006,JPO&NCIPI
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