发明名称 |
METHOD OF FORMING PLATED PRODUCT USING NEGATIVE PHOTORESIST COMPOSITION AND PHOTOSENSITIVE COMPOSITION USED THEREIN |
摘要 |
A method is provided that enables the formation of multiple level plated products with large plating depth. A negative photoresist composition comprising (a) an alkali-soluble resin, (b) an acid generator, and (c) other components is used, and a plated product is formed by (A) a step of forming a layer of this negative photoresist composition, and then either heating or not heating, before conducting exposure; (B) a step of repeating the step (A) so that the step is performed a total of 2 or more times, thereby superimposing layers of the negative photoresist, and subsequently developing all of these layers simultaneously to form a multilayer resist pattern; and (C) a step of conducting plating treatment within this multilayer resist pattern. |
申请公布号 |
WO2006003757(A1) |
申请公布日期 |
2006.01.12 |
申请号 |
WO2005JP08846 |
申请日期 |
2005.05.10 |
申请人 |
TOKYO OHKA KOGYO CO., LTD.;MASUDA, YASUO;WASHIO, YASUSHI;SAITO, KOJI |
发明人 |
MASUDA, YASUO;WASHIO, YASUSHI;SAITO, KOJI |
分类号 |
G03F7/00 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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