| 摘要 |
<p>An ion balance sensor capable of detecting an ion balance precisely with a simple configuration thereby to reduce the size and lower the manufacturing cost. The ion balance sensor can detect the ion balance near the surface of an object to be destaticized. The ion balance sensor comprises an antenna (20) to be charged with positive ions or negative ions, and a normally-ON type MOSFET (11) having its gate electrode (G) connected with the antenna (20), its source electrode (S) grounded and connected with an ion balance detecting resistor (R) between itself and the gate electrode (G), and its drain electrode (D) connected with a series connection of a DC power source (V<SUB>DS</SUB>) and a load resistor (R<SUB>L</SUB>) between the source electrode (S) and itself. The voltage of the gate electrode (G) is varied by the voltage drop which is caused by the current to flow between the charged antenna (20) and the earth through the ion balance detecting resistor (R) so that the variation in the drain current by the voltage is detected to detect the positive-negative balance of the ions having charged the antenna (20).</p> |
