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发明名称
摘要
申请公布号
JP2006501366(A)
申请公布日期
2006.01.12
申请号
JP20040540443
申请日期
2003.09.09
申请人
发明人
分类号
C23C16/505;C23C14/35;C23C14/56;H01J37/32;H01J37/34;H05H1/46
主分类号
C23C16/505
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