DECOMPOSITION EQUIPMENT OF CARBON FLUORIDES

摘要

PROBLEM TO BE SOLVED: To provide decomposition equipment of carbon fluorides capable of completely and economically decomposing and detoxicating carbon fluoride gas harmful for environment through a simple process.

SOLUTION: A process for decomposing the carbon fluorides is constituted such that gaseous perfluorocarbon or hydrofluorocarbon is brought into contact with a reaction agent consisting of a carbonaceous solid material and an alkali earth metal compound in the presence of oxygen gas of 20 vol.% or less (not containing 0%) at a temperature 300°C or more.

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