| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of adjusting and controlling the machining condition to an optimum one in the real time basis while considering the machining situation such as a machining shape of a work during the machining. <P>SOLUTION: The laser beam machining apparatus comprises an optical system having mirrors 2, 3, 8 to lead laser beams L emitted from a laser beam oscillator 1 to a work 10 and a condensing lens 9, a machining shape measurement means 21 which is coaxially arranged to the extension of the optical axis on the incident optical path of the laser beams L to the work 10 to directly measure the two-dimensional machining shape of the work, a control unit 22 to output the control signal for feedback to match the data of the measurement result of the machining shape measurement means 21 with the data of the predetermined shape, and a very small deformation mirror 19 for changing the beam shape to change the shape of the laser beams L into the beam shape having the predetermined spatial intensity distribution based on the control signal input from the control unit 22. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
