| 摘要 |
PROBLEM TO BE SOLVED: To provide a method by which the laser chamber of an ultraviolet gas laser device can be reproduced easily in a short time by omitting the labor of cleaning/removing dust generated in the laser chamber. SOLUTION: At the time of opening the laser chamber of the ultraviolet gas laser device to the atmosphere for exchanging a consumable component, the accumulated dust in the chamber is prevented from absorbing water by adjusting the dew-point temperature in the working environment to≤-20°C or, after the consumable component is exchanged and the chamber is isolated from the atmosphere, the water absorbed by the accumulated dust while the chamber is opened to the atmosphere is discharged from the inside of the chamber by performing a dust dehydrating process by introducing a fluorine gas into the chamber. COPYRIGHT: (C)2006,JPO&NCIPI
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