| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp, a support plate which prevents illuminance from decreasing and uniformity of the illuminance from deteriorating, where the support plate prevents the inner tube of a dual cylindrical discharge container from bending. SOLUTION: A notch is formed along a light extracting direction in the support plate which is mounted between the inner tube and the outer tube making up the discharge container, to support the inner tube, and to prevent the inner tube from bending. COPYRIGHT: (C)2006,JPO&NCIPI
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