| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical displacement gage capable of coping with speed-up of measurement, while keeping an advantage of feedback control of the emission quantity of a light emitting element or the amplification factor of an amplifier. SOLUTION: This optical displacement gage is equipped with the light emitting element for irradiating an object with light, an image sensor for receiving light from the object and generating an image signal, a signal processing circuit including the amplifier for amplifying the image signal from the image sensor, and a control part for executing feedback control of at least one of control inputs including the emission quantity of the light emitting element and the amplification factor of the amplifier based on the image signal from the signal processing circuit. At least one variable width of the control inputs in the feedback control can be changed and set. The control part sets a proper variable width of the control input based on data of the control input in a prescribed period in a variable width setting mode. COPYRIGHT: (C)2006,JPO&NCIPI
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