摘要 |
<P>PROBLEM TO BE SOLVED: To provide a (meth)acrylate useful as a raw material for component resins for coatings, adhesives, tacky agents, resins for ink, resists, molding materials, optical materials, etc., a polymer of the (meth)acrylate and a resist composition using the polymer. <P>SOLUTION: The (meth)acrylate is represented by formula (1) (wherein R is a hydrogen atom or a methyl group; in R1 to R4, at least one of R1 and R2 and at least one of R3 and R4 together form a cyclic hydrocarbon group together with a carbon atom to which they link and residual R1 to R4 not forming the ring are each a hydrogen atom or an alkyl group). The polymer uses the (meth)acrylate as a monomer. The resist resin uses the polymer. <P>COPYRIGHT: (C)2006,JPO&NCIPI |