| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mechanism which absorbs an inertial force, vibration, etc., operating on a mask during mask conveyance. <P>SOLUTION: A hand 23 is rotated by 180° to replace the mask, but the mask is applied with an inertial force corresponding to the mass and acceleration of the mask at this time since a stepping motor is self-actuated to move. This inertial force is reduced by using parallel springs 12L and 12R below a mask holding mechanism 15, so that the mask keeps its position without sliding on the mask holding mechanism 15. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
