| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a load lock mechanism that is used to carry in/out a substrate to/from a chamber under a controlled environment and that can eliminate a difference in pressure between the inside of the chamber and the inside of the load lock, and to prevent particles from being stirred up when the inside of the load lock is communicated with that of the chamber. <P>SOLUTION: In the load lock mechanism that can be freely connected to each of two or more independent spaces having different atmospheres through a gate valve, at least one space among the spaces and at least one load lock mechanism are communicated through at least one pressure regulating means. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
