| 摘要 |
PROBLEM TO BE SOLVED: To easily meet a high-density arrangement, to avoid the generation of cross talk even in the case of a high-density arrangement, and to obtain a stable fluid jetting characteristic. SOLUTION: In a functional element equipped with vibration actuators 11, 13, 15 and 16 formed on a substrate 12, a pressure chamber 22 in which a pressure change is applied to a fluid by the vibration actuators 11, 13, 15 and 16, and a discharge opening 25 for the fluid, at least one through hole 30 which leads to the pressure chamber 22 is formed in the substrate 12. Feeding of the fluid into the pressure chamber 22 is carried out via the through hole 30, and discharging of the fluid from within the pressure chamber 22 is carried out via the discharge opening 25. COPYRIGHT: (C)2006,JPO&NCIPI
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