| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device for drying a substrate, and a method therefor. <P>SOLUTION: A system provides a device for drying substrates by utilizing Marangoni effect, the substrate is placed on the device having a rotatable support section 100, on which a first nozzle 220 for supplying deionized water and a second nozzle 320 for supplying isopropyl alcohol vapor are provided. First, when the isopropyl alcohol vapor is supplied to the center of the substrate, the amount of alcohol is controlled by an adjusting section 500 so as to allow the alcohol amount reaching the substrate to be increased gradually. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
