| 摘要 |
PROBLEM TO BE SOLVED: To provide pattern correction equipment that improves the accuracy of applying a coating agent to a defective part and reduces a time taken for correction. SOLUTION: This pattern correction equipment 1 has an object lens 17e positioned facing a color filter substrate 8 with a pattern formed, and comprises an imaging optical system 3 for magnifying a defective part for observation through the above object lens 17e, a coating unit 6 for blowing out a correction ink stored in an ink tank to the defective part via a coating needle 28 provided to the ink tank, and a laser light source 23 for hardening the correction ink by radiating rays to the applied correction ink. In addition, the coating unit 6 is directly provided to or near the object lens 17e of the imaging optical system 3. COPYRIGHT: (C)2006,JPO&NCIPI
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