| 摘要 |
PROBLEM TO BE SOLVED: To provide a disc valve for increasing the adhesive force of a diamond-like hard carbon film to a base forming valve elements, having operating torque less changed in long-time use to prevent the generation of abnormal sounds. SOLUTION: The disc valve comprises the pair of valve elements for sliding each other and the diamond hard carbon film adhered to at least one of the valve elements to form a slide-contact face. The base of one valve element has a liquid phase. On the upper face of the base, an atom-injected atom mixed layer is formed constituting the base. The mixed layer is formed on the base over both crystal particles and the liquid phase. COPYRIGHT: (C)2006,JPO&NCIPI |
