| 摘要 |
A stage apparatus including a guide unit having a first guide and a second guide spaced from each other; a movable unit provided between the first guide and the second guide and being movable relative to the guide unit; an air bearing provided between the first guide and the movable unit and coupled to either the first guide or the movable unit; an actuator coupled to one of the movable unit and the second guide and contacting the other one thereof in order to allow the movable unit to be movable relative to the guide unit; and a stage coupled to one of the movable unit and the guide unit and being movable relative to the other one thereof. With this configuration, a stage apparatus which has a relatively simple structure and is easily assembled and disassembled is provided.
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