| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate sucking and carrying device capable of individually setting a suction area even for substrates of various sizes or different types, and maintaining the suction status and recording grade of the substrate high. <P>SOLUTION: The suction holes 23 of a sucking plate 18 are formed so as to be independently openable and closable by a suction hole opening/closing member 24 disposed on the positions corresponding to the suction holes 23 and provided so as to be lifted/lowered from a base plate 19. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
