| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for forming a barrier film at an inner surface of a plastic container capable of coating a superior quality film having a uniform thickness at the inner surface of a plastic container, reducing a maintenance work and satisfying a low requisite mechanical precision of the device. SOLUTION: This device comprises an external electrode enclosing a plastic container of processed item when the container is inserted, a grounded gas exhausting pipe fixed to an end surface of the external electrode at a side where an opening of the container is positioned through an insulating member, an exhausting means for exhausting gas in the plastic container inserted into the external electrode through the gas exhausting pipe, gas supplying means for supplying raw material gas into the plastic container inserted into the external electrode and a high frequency power supply connected to the external electrode. A conductive member having a gas flowing hole is arranged in the exhaust pipe while being contacted with the inner surface of the exhaust pipe. COPYRIGHT: (C)2006,JPO&NCIPI
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