SINGLE PIECE COIL SUPPORT ASSEMBLIES, COIL CONSTRUCTIONS AND METHODS OF ASSEMBLING COIL CONSTRUCTIONS

摘要

The invention includes a coil support assembly (130) having an insulator (132) interfacing a surface of a shield (22) disposed within a processing chamber. The insulator (132) has an extension which extends through the shield (22). A second insulator (131) is disposed between the shield (22) and a coil (26) and contacts a protrusion (40) extending from the coil. A fastener (134) is disposed through the first insulator (132) and extends through the second insulator (131) and into the protrusion (40). The fastener (134) is electrically isolated from the shield (22) by the first insulator (132). The invention includes coil assemblies containing the described coil support configuration. The invention further includes a method of supporting a coil within a processing chamber having a shield disposed therein. Insulators are inserted to extend from an outer side of the shield through a thickness of the shield. A coil is mounted within the chamber by inserting fasteners the invention includes a coil support assembly having an insulator interfacing a surface of a shield disposed within a processing chamber. The insulator has an extension which extends through the shield. A second insulator is disposed between the shield and a coil and contacts a protrusion extending from the coil. A fastener is disposed through the first insulator and extends through the second insulator and into the protrusion. The fastener is electrically isolated from the shield by first insulator. The invention includes coil assemblies containing the described coil support configuration. The invention further includes a method of supporting a coil within a processing chamber having a shield disposed therein. Insulators are inserted to extend from an outer side of the shield through a thickness of the shield. A coil is mounted within the chamber by inserting fasteners through each insulator into bosses which protrude outwardly from the coil body.