发明名称 |
MASTER DISK EXPOSURE METHOD, OPTICAL EXPOSURE APPARATUS, METHOD FOR MANUFACTURING INFORMATION RECORDING MEDIUM, STAMPER FOR INFORMATION RECORDING MEDIUM, AND INFORMATION RECORDING MEDIUM |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide an master disk exposure method for obtaining a master disk for a high density information recording medium. <P>SOLUTION: In the master disk exposure method, a pre-pit part 102 is exposed by irradiating a photoresist layer applied on the surface of the master disk with a first laser beam (beam 1) following a prescribed exposure signal and a front edge exposure part 104 and a rear edge exposure part 105 in the track direction of the pre-pit part 102 are exposed by using three laser beams of the first laser beam (beam 1), a second laser beam (beam 2-1) and a third laser beam (beam 2-2) which are synchronized with the first laser beam (beam 1). Thereby, the master disk for the information recording medium having a pre-pit whose end is rectangularly formed can be obtained. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
申请公布号 |
JP2006012334(A) |
申请公布日期 |
2006.01.12 |
申请号 |
JP20040190136 |
申请日期 |
2004.06.28 |
申请人 |
HITACHI MAXELL LTD |
发明人 |
YOSHIOKA TERUFUMI;SUGIYAMA TOSHINORI;KON ZEN |
分类号 |
G11B7/0045;G11B7/007;G11B7/135;G11B7/24;G11B7/26 |
主分类号 |
G11B7/0045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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