发明名称 MASTER DISK EXPOSURE METHOD, OPTICAL EXPOSURE APPARATUS, METHOD FOR MANUFACTURING INFORMATION RECORDING MEDIUM, STAMPER FOR INFORMATION RECORDING MEDIUM, AND INFORMATION RECORDING MEDIUM
摘要 <P>PROBLEM TO BE SOLVED: To provide an master disk exposure method for obtaining a master disk for a high density information recording medium. <P>SOLUTION: In the master disk exposure method, a pre-pit part 102 is exposed by irradiating a photoresist layer applied on the surface of the master disk with a first laser beam (beam 1) following a prescribed exposure signal and a front edge exposure part 104 and a rear edge exposure part 105 in the track direction of the pre-pit part 102 are exposed by using three laser beams of the first laser beam (beam 1), a second laser beam (beam 2-1) and a third laser beam (beam 2-2) which are synchronized with the first laser beam (beam 1). Thereby, the master disk for the information recording medium having a pre-pit whose end is rectangularly formed can be obtained. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006012334(A) 申请公布日期 2006.01.12
申请号 JP20040190136 申请日期 2004.06.28
申请人 HITACHI MAXELL LTD 发明人 YOSHIOKA TERUFUMI;SUGIYAMA TOSHINORI;KON ZEN
分类号 G11B7/0045;G11B7/007;G11B7/135;G11B7/24;G11B7/26 主分类号 G11B7/0045
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